ǹ̴ 繰 ̳ Ͽ 캽 ̴. 繰 ̳ ¸ 캸 ü ΰ̰ ΰ ִ ñ̴. ϴ θ ν Ǻϴ ɷ¡ ش ñ 忡 ݺϹǷ, ñ ߿ ش ϴ.
(Louis de Brogile, 1892 ~ 1987) ª ڰ ش ū ȮϿ, ̴ ̰ ߷ ̾. ķ ݺϹǷ, ̰ ش ̱ (ķμ) ª 帧 ؼ ڿ ִ ̴ ̾. ʰ ̰(Ultra-High Voltage Transmission Electron Microscope) 0.1nm ش ϳ ũ ġؾ Ѵ.
ũ(Werner Heisenberg, 1901 ~ 1976) ٺ Ѱ迡 ̷ Ȯ , ع̼ ϰ Ǵ ҰϹǷ ġ ÿ Ȯϰ . , ũ ϴ ü Ѱ踦 ȴ.
, ñ ̿ 忡 , ̰ ٸ 帧 ص (contrast) ̸ ̴. ̴ ڸ Űų(Transmission Electron Microscope) Ͽ 2ڸ ϵ Ͽ(Scanning Electron Microscope) ϰų ݻ 帧 ϴ ᱹ ڸ ̿ ١ Ͱ ǹ̰ ȴ.
̷ ǹ̿ ¡ ϰų κ ݻ ʴ ȯ , ο з ȯ̾. , ̰ Ȯ ̾ٸ, ڿп ͳθ Ͽ ڴ ǥ鱸 ϴ ֻ ͳθ ̰ ߸ Ȯ ̴.
ԸƮ (Gerd Binnig, 1947~) θ η(Heinrich Rohrer, 1933~) 븮 ġ IBMҿ 1979 ֻ ͳθ ̰ ߸ϰ, Ưû 1979 9 20ڷ ߸ Ī Raster-tunnelmikroskop Ͽ Ư(CH1979-0008486)Ͽ, ĸ Ϸκ 1 ̳ 1980 9 12Ͽ ̱ Ưû Scanning Tunneling Microscope ߸ Ī Ͽ (US 186923)Ͽ.
1. ̱ Ư186923, Scanning Tunneling Microscope(̱ Ưû Ư)
Ư 1982 8 10 ̱ Ϲ, ̵ 1982 4 Ǿ м [1]Ǿ. Ͽ η ǥ м ũ Ź(Christoph Gerber) 幮Ʈ ̺(Edmund Weibel) ̸ ڷ Ǿ ִ.
ο ߰ϰų ߸Ͽٸ Ư Բ ϰ ǥϴ ٶϴ. Ư űԼ ־ ϹǷ ڽ ǥ ؼ ִ. ԸƮ θ η ʸ Ͽ Ư ǥ 迡 캸 .
ǥ űԼ
ѱ Ư 29 Ư 1 űԼ(̱ Ư 102) ϰ ְ 2 (̱ Ư 103) ϰ ִ. űԼ ߸ Ư ٴ Ģ, Ư ű 밡 οϴ ̱ ̴.
űԼ Ǵµ, Ưϴ ο ǰų ¿ ǽ, Ǵ ϴ ȸ(ͳ ) Ǿ ̿밡ϰ Ǹ űԼ ǵȴ. ǥ (μ) ȸ (ͳ ) شϰ ȴ.
Ư ߿ űԼ̹Ƿ, űԼ ٸ ڽ ǥ شȴ. ڽ ̶ ص ϰ Ư Ѵٸ, Ư ű ϴ ƴϱ ̴.
ڱ Ư ϴ Ȥϰ, ż ϵ ϴ ǥ Ͽ, Ư ߸̶ Ͽ ϸ ߸ űԼ ǵ ʴ ϴ ܱ ΰ ִ.
̸ Ǵ űԼǿ ̶ ϴµ Ư 30(̱ Ư 102(b)) ϰ ִ. ѱ Ư Ϸκ 6 ̳ Ͽ Ͽ, ѹα ߱ ѹα ߱ ѱȯ 2012 3 15[2] Ưʹ ̱Ư Ⱓ 1 Ǿ.
ѱ ̱ ǥ Ư ִ űԼ Ⱓ 1 , Ϻ 6̸ ̳ ߱ ̷ ʴ´. űԼ Ư ÿ ؾ ϸ, űԼ ȴٰ ص ʷ Ͽ ĸ ٰ ؿ ϰų PCT ϴ 쿡 ĸ ϴ 1 켱 Ⱓ̳, PCT ϴ 30 ܰ ԱⰣ ʴ´. , ĸ 켱 ̵ PCT ̵ Ϻ ̱ 1 ̳, Ϻ 6 ̳ Ǿ Ѵ.
Ƿ ο Ͽ Ư ϰ ϴ ٶϴ. Ư㹮 ߾ ϹǷ ۼ ð ɸ ε Ư ̷ ذ ִ ϰ ִ.
ڰ ۼϴ Ͽ ̱ Ѵ. , û ʰ ߸ 븸 Ư Ŀ ʰ ۼϿ ϴ ϴ. ۼ Ƿ ѱ ϴ.
ѱ Ư 42 Ư ϸ鼭 5 Ưû Ⱓ [3] ֵ Ͽ, ۼ ߸ ȯϿ ϴ ϵ ϰ ִ.
η ǥ Ư
η ʴ Ư ǥ ̻ ش. Ұ ġ ʷ ϰ, ĸ Ư㸦 켱 ϸ鼭 1 ̳ ̱ Ͽ ϹҴ. ߸ ̸ (1)߸ ϼ ϰ, (2) ذ ϰ, (3) ȣ ̸ Ͽ ߸ Ȯϰ Ͽ.
3. Ư(1979) 켱Ͽ ̱ (1980) Ư
, Ư 1982 ǵ Ͽ, ڽ ǥ Ư űԼ Ǵ Ͽ. ٿ Ϻ ڽŵ ̸ , Ư Ұ [4] 繮 ν Ưǰ Ͽ ִ ݴ. ֻ ͳθ ̰ η 뺧л ϴµ ٸ ̱ ϴ.
[1] Phys. Rev. Lett. vol. 49, 57~61 (1982)
[2] ѹα ߱ ѱȯ(: 2012 3 12)
[3] 2007.1.3. Ư 8197ȣ
[4] Surface Science 126, 236 ~ 244 (1983)
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